Microlithography Strategy for Future ULSI Movie Review 19??

Covers the basic knowledge needed to evaluate and use the alternative lithography strategies and present criteria that need to be factored into making strategic decisions on future microlithography systems. Includes information on the principles of microlithography, microlithography tools, future manufacturing, UV lithography, VLSI and ULSI lithography, x-ray lithography, and optical projection. Comes with course program guide.

Distribution

Massachusetts Institute of Technology (MIT), Center for Advanced Educational Services, 77 Massachusetts Ave., Rm. 9-234, Cambridge, MA 02139-4307, Phone: (617)253-7408, Fax: (617)253-8301, Email: caes-courses@mit.edu, URL: http://www-caes.mit.edu

Available on VHS

Cast and Crew

Genres

Engineering, Technology