The chemistry of the photoresist process is included in this lengthy course on microlithography.
University of Arizona, University Teaching Center, 1017 N. Mountain Ave., PO Box 210102, Tucson, AZ 85721-0102, Phone: (520)621-7788, Fax: (520)626-7314, URL: http://www.utc.arizona.edu
Available on VHS
Running time 75 minutes.
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